The hot plate is made of aluminum of high thermal conductivity and anodized.
To ensure uniform heating, the surface temperature is measured at 9 different spots over 8-inch wafer with surface thermometer on silicon wafer.
This device has an internal vacuum pump with low noise. Expected lifetime is > 5000 hours with continuous operation. With a brushless motor, frequent turning on/off of the motor does not reduce the lifetime. Additionally, a 1/4 inch Outer Diameter of tube connector is available for using the external vacuum line.
To accommodate wafers of different sizes, SS cap screws can be screwed into vacuum-ring holes on the heating plate. To permit proper vacuum holding of wafers, all holes not covered by the wafers need to be sealed by screws. This device handles wafers with a diameter of 1, 2, 3, 4, 6, and 8-inches.
The 2 SS cap screws can be installed into the 2 holes just located on the outside of the loaded wafer-edge to safely load the wafer with tweezers (hold one side of the wafer with tweezers while loading the wafer on the plate).
This model allows you to change temperatures and maintain steady temperatures with an PID controller.

Safety features

Alarm buzzer is on the front side. Its settings can be modified on the controller.
Thermostat turns off the heater power in case the controller box is hotter than 50 C, and auto reset once returning to <35 C.

Attention

We test every device before packing and shipping. The device remains fully functional even with the presence of small cosmetic imperfection spots (for example, minor touches on the top surface).
The top surface may gradually become discolored (white to grey) without functional degradation as baking for long time.

Model 300A for Wafer Processing with Vacuum-Holding up to 8-inch Diameter Wafer from Room Temperature to 300 C